XLF, Aluminum High Vacuum Angle Valve, Normally Closed, O-ring Seal
XLF is a normally closed, single acting high vacuum angle valve with an O-ring shaft seal. The XL* family shares common features with all series members. Bodies are made of aluminum for light weight and excellent thermal conductivity, resulting in a uniform temperature for the entire valve body. The body offers excellent resistance to fluorine corrosion. A low sputtering yield and the absence of heavy metals avoid wafer contamination.
Excellent thermal conductivity offers uniform temperature and decreased gas condensation inside valve
High corrosion resistance to fluorine gas
Minimal outgassing
Minimal contamination from heavy metals
Optional heaters
Optional position sensors
Optional oxalic acid anodizing for internals
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