XLD, Aluminum High Vacuum Angle Valve, Air Operated
High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
Light weight and compact
Uniform baking temperature
High fluorine resistance
Low outgassing
Little heavy metal contamination
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