XL*Q, High Vacuum Angle Valve, Aluminum One-touch Connection & Release
High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
One-touch connection & release, requires no tools
Lightweight & compact
Auto switch capable
XLAQ: single acting, normally closed, bellows seal
XLAQ: flange sizes are 16, 25, 40, 50
XLDQ: 2-step control, single acting
XLDQ: flange sizes are 40, 50
Downloads
The part number needs to be complete in order to view/download CAD Models.
Model does not exist, please email customer.service@airlinehyd.com with the complete part number, CAD file format and version required.