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XGT*, High Vacuum Slit Valve

Series XGT slit valve is suitable for the partition valve between the load lock chamber and the transfer chamber, and between the transfer chamber and the process chamber in semiconductor manufacturing equipment, etc.

Long service life: 3 million cycles (within standard temperture range)
Low particle generation: reduced by 1/5 or more (compared with the current product)
Easier maintenance
Easy replacement of bellows
Gate can be replaced from above (Made to order)
Safety measures
A mechanical end lock mechanism has been adopted

Select Product Options

	Select values from the drop down lists or make appropriate selections to configure the part number.
Type
Valve Size
Valve Type
Opening Window Size
Gate O-ring Material
Auto Switch & Connector
End Lock
	Options in: Gray are not compatible with other selected option value. Red conflict with another selected option value. Amber are not recommended.

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SMC Product Configurator

XGT*, High Vacuum Slit Valve

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Headquartered in Brighton, Michigan with stocking offices in Cleveland, Ohio and Grand Rapids, Michigan, H.H.Barnum is the leader in products, solutions and controls for factory automation.