• H.H. Barnum Company | Controls for Factory Automation

SMC Product Configurator

AZ3652 & AZ4652, Diaphragm Valve, Manually Operated

Series AZ is an ultra high purity (UHP) diaphragm valve for gas delivery in semiconductor and other clean industries.  This series is available in manually operated.

  • Cleaned for high purity semiconductor applications
  • Cleanroom assembled and Helium leaked tested
  • Valve meets dimensional requirements of SEMI F36-0299, Option 1
  • User-friendly forged body
  • Compact and lightweight
Configuration Options
  
 
Select Product Options
Select values from the drop down lists or make appropriate selections to configure the part number.
Size Configuration Status
Ports Configuration Status
Inlet Connection Configuration Status
Outlet Connection Configuration Status
Seat Material Configuration Status
Options in:
  • Gray are not compatible with other selected option value.
  • Red conflict with another selected option value.
  • Amber are not recommended.

Downloads

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CAD Downloads

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Product Catalog

Series Catalog
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